Mems: A Practical Guide Of Design, Analysis, And Applications

A new generation of MEMS books has emerged with this cohesive guide on the design and analysis of micro-electro-mechanical systems (MEMS). Leading experts contribute to its eighteen chapters that encompass a wide range of innovative and varied applications. This publication goes beyond fabrication techniques covered by earlier books and fills a void created by a lack of industry standards. Subjects such as transducer operations and free-space microsystems are contained in its chapters. Satisfying a demand for literature on analysis and design of microsystems the book deals with a broad array of industrial applications. This will interest engineering and research scientists in industry and academia.

• | Author: Jan Korvink, Oliver Paul
• | Publisher: Springer
• | Publication Date: Mar 30, 2019
• | Number of Pages: 990 pages
• | Language: English
• | Binding: Paperback
• | ISBN-10: 3662568357
• | ISBN-13: 9783662568354