Overview
Integrated circuits are finding ever wider applications through a range of industries. Introduction to VLSI Process Engineering presents the design principles for devices, describes the overall VLSI process, and deals with the essential manufacturing technologies and inspection procedures.
- | Author: Y. Naka
- | Publisher: Springer
- | Publication Date: Jun 30, 1993
- | Number of Pages: 210 pages
- | Binding: Hardback or Cased Book
- | ISBN-10: 0412395509
- | ISBN-13: 9780412395505
