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Resonant Network Antennas for Radio-Frequency Plasma Sources: Theory, technology and applications

Resonant Network Antennas for Radio-Frequency Plasma Sources: Theory, technology and applications

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Product Details
Author:
Philippe Guittienne
Publisher:
Institute of Physics Publishing
Publication Date:
Feb 28, 2024
Number of pages:
502 pages
Binding:
Paperback or Softback
ISBN-10:
0750352973
ISBN-13:
9780750352970

Overview

Resonant network antennas can overcome the limitations of conventional RF plasma sources. Their intense currents at resonance are well suited for inductive coupling in novel reactor configurations. This reference text explains the complete theory of resonant antennas, from fundamental circuits to mutual partial inductance coupling with plasma, and helicon wave theory.


  • | Author: Philippe Guittienne
  • | Publisher: Institute of Physics Publishing
  • | Publication Date: Feb 28, 2024
  • | Number of Pages: 502 pages
  • | Binding: Paperback or Softback
  • | ISBN-10: 0750352973
  • | ISBN-13: 9780750352970

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