Overview
Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications. Audience: Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge.
- | Author: P. F. Williams
- | Publisher: Springer
- | Publication Date: May 31, 1997
- | Number of Pages: 613 pages
- | Binding: Hardback or Cased Book
- | ISBN-10: 0792345673
- | ISBN-13: 9780792345671
