Overview
The ability to make small features in Si, metals, dielectrics and other materials is what has enabled rapid advances in computing, communications, aeronautics and all other technologies that depend on microelectronics, miniature sensors and actuators and magnetic data storage. Plasma techniques enable the fine control and accurate pattern transfer and thus are central to our technology age.
- | Author: R. J. Shul
- | Publisher: Springer
- | Publication Date: Nov 01, 2012
- | Number of Pages: 655 pages
- | Binding: Paperback or Softback
- | ISBN-10: 3642630960
- | ISBN-13: 9783642630965
