Magnetrons, reactive gases and sputtering

This handbook covers the fundamental aspects of reactive magnetron sputter deposition. This so-called physical vapor deposition technique is used to grow compound thin films. The books starts with an explantation of the four title words. Using a simple model several aspects of the deposition technique are introduced. In the following chapters the book introduces a more complete mode to address some specific features of reactive sputter deposition. Finally, some important points related to thin film growth are introduced and illustrated.

• | Author: Diederik Depla
• | Publisher: Lulu.com
• | Publication Date: December 10, 2019
• | Number of Pages: 478 pages
• | Language: English
• | Binding: Hardcover
• | ISBN-10: 1304347818
• | ISBN-13: 9781304347817