MEMS Mechanical Sensors

The main aim of this book is to give an overview of MEMS mechanical transducers. The text focuses mainly on examples of commercial and research devices; however, attention is also given to manufacturing techniques and materials, as well as the basic principles behind the operation of these devices.

• | Author: Stephen Beeby
• | Publisher: Artech House Publishers
• | Publication Date: Apr 30, 2004
• | Number of Pages: 269 pages
• | Binding: Hardback or Cased Book
• | ISBN-10: 1580535364
• | ISBN-13: 9781580535366