Handbook of Silicon Based MEMS Materials and Technologies (Micro and Nano Technologies)
Elsevier
ISBN13:
9780128177860
$349.41
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Elsevier
Handbook of Silicon Based MEMS Materials and Technologies (Micro and Nano Technologies)
- | Author: Markku Tilli, Mervi Paulasto-Krockel, Horst Theuss, Matthias Petzold, Teruaki Motooka, Veikko Lindroos
- | Publisher: Elsevier
- | Publication Date: Apr 17, 2020
- | Number of Pages: 1104 pages
- | Language: English
- | Binding: Paperback
- | ISBN-10: 0128177861
- | ISBN-13: 9780128177860
- Author:
- Markku Tilli, Mervi Paulasto-Krockel, Horst Theuss, Matthias Petzold, Teruaki Motooka, Veikko Lindroos
- Publisher:
- Elsevier
- Publication Date:
- Apr 17, 2020
- Number of pages:
- 1104 pages
- Language:
- English
- Binding:
- Paperback
- ISBN-10:
- 0128177861
- ISBN-13:
- 9780128177860
