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Chemical Vapor Deposition of Tungsten and Tungsten Silicides for VLSI/ ULSI Applications (Materials Science and Process Technology Series)

Chemical Vapor Deposition of Tungsten and Tungsten Silicides for VLSI/ ULSI Applications (Materials Science and Process Technology Series)

William Andrew
SKU:
9780815512882
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ISBN13:
9780815512882
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Description
  • | Author: John E.J. Schmitz
  • | Publisher: William Andrew
  • | Publication Date: January 14, 1993
  • | Number of Pages: 251 pages
  • | Language: English
  • | Binding: Hardcover
  • | ISBN-10: 0815512880
  • | ISBN-13: 9780815512882
Additional Information
Author:
John E.J. Schmitz
Publisher:
William Andrew
Publication Date:
January 14, 1993
Number of pages:
251 pages
Language:
English
Binding:
Hardcover
ISBN-10:
0815512880
ISBN-13:
9780815512882
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