A Guide to Hands-on MEMS Design and Prototyping

Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects, as well as computer-aided design tools (layout, modeling) that can be used for the design of MEMS devices. Numerous design examples are described and analysed, from fields including micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. There's also a final chapter on packaging and testing MEMS devices, as well and exercises and design challenges at the end of every chapter. Solutions to the design challenge problems are provided online.

• | Author: Joel A. Kubby
• | Publisher: Cambridge University Press
• | Publication Date: September 30, 2011
• | Number of Pages: 178 pages
• | Language: English
• | Binding: Paperback
• | ISBN-10: 1107645794
• | ISBN-13: 9781107645790